发明名称 CMOS image sensor with backside illumination and method for manufacturing the same
摘要 A CMOS image sensor includes a plurality of pixel regions formed under a front surface of a substrate, and having photodiodes separated from each other by a field oxide, a multi-layered metal interconnection formed over the pixel regions of the front of the substrate, a bump connected to an uppermost metal interconnection of the multi-layered metal interconnection, a plurality of trenches formed in a backside of the substrate, wherein the trenches have different depths for each wavelength of light, and correspond to the respective pixel regions, and a glass covering the backside of the substrate.
申请公布号 US2007152250(A1) 申请公布日期 2007.07.05
申请号 US20060646236 申请日期 2006.12.28
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 KIM HEE-JEEN
分类号 H01L31/113;H01L27/146;H04N5/335;H04N5/369;H04N5/374 主分类号 H01L31/113
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