| 摘要 |
PROBLEM TO BE SOLVED: To provide a tape cutting device and tape cutting method, simple in constitution, preventing dropping of slices, lengthening the life of a cutter and reducing trouble. SOLUTION: This tape cutting device includes: a notch cutter 41 shaped conformable to a notch N formed in a wafer W; an elevating mechanism 42 for inserting and removing the notch cutter 41 to and from the position corresponding to the notch N in a tape T; a circle cutter 51 for cutting the tape T in a circular track; and a circle cutter driving mechanism 52 for moving the circle cutter 51 along the outline of the wafer W. After cutting by the notch cutter 41, the tape T is press-bonded to the wafer W and cut by the circle cutter 51. COPYRIGHT: (C)2007,JPO&INPIT |
