METAL WIRING, METHOD OF MANUFACTURING SAME, DISPLAY SUBSTRATE HAVING METAL WIRING, AND METHOD OF MANUFACTURING DISPLAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide metal wiring, a method of manufacturing the same, a display substrate comprising the metal wiring, and a method of manufacturing the same whereby a wiring failure can be prevented and a manufacturing process can be simplified. SOLUTION: A metal film is provided which is formed of a metallic substance including copper on a base substrate, and a first amorphous carbon film is provided which is formed in contact with the undersurface of the metal film. With this configuration, low-resistance metal wiring including the amorphous carbon film is formed, so that the manufacturing process can be simplified and a wiring failure can be prevented. COPYRIGHT: (C)2007,JPO&INPIT