| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance-type pressure sensor capable of improving the sensor sensitivity and improving airtightness inside the cavity between a diaphragm and a fixed electrode. SOLUTION: A first silicon substrate 12 is jointed to the side of a main surface 11b in a glass substrate 11. The first silicon substrate 12 has the fixed electrode 12a and a projection 12b, and the fixed electrode 12a and the projection 12b penetrate the glass substrate 11 and are exposed at the side of one main surface 11a. An extraction electrode 13 for the fixed electrode 12a is formed on the upper surface of the projection 12b. A second silicon substrate 14, having a pressure-sensitive diaphragm 14a that is the movable electrode of a pressure sensor, is jointed onto a junction surface 11d on the main surface 11a of the glass substrate 11. The extraction electrode 13 comprises double-layer seed layers 13a, 13b formed on the projection 12b, and an electrode pad 13c formed on the upper-layer seed layer 13b. COPYRIGHT: (C)2007,JPO&INPIT
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