发明名称 SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which uneven surface levels are prevented from being partially formed depending on the location of the device isolation film between neighboring active regions, and to provide a method for manufacturing the same. SOLUTION: The semiconductor device comprises: a substrate in which field regions and active regions are defined; device isolation films 44A formed on the field regions; prevention films 45 formed on the device isolation films 44A; and gate lines 46 formed on the substrate to traverse the field regions and active regions. The semiconductor manufacturing method comprises: a first step of forming device isolation films 44A on predetermined regions of the semiconductor substrate to define the field regions and active regions; a second step of forming prevention films 45 on the device isolation films 44A; and a third step of forming gate lines 46 on the semiconductor substrate to traverse the field regions and the active regions. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007173764(A) 申请公布日期 2007.07.05
申请号 JP20060181445 申请日期 2006.06.30
申请人 HYNIX SEMICONDUCTOR INC 发明人 HAN SANG-YEOP;SHIN SEUNG-A
分类号 H01L21/76 主分类号 H01L21/76
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