摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a foreign matter removing method preventing adhering of an adhesive matter by an adhesive roller, and removing foreign matter on the surface of rugged wiring patterns, and a forming apparatus of a multi-layered body using the method. <P>SOLUTION: In this method of removing foreign matter on a base material, the foreign matter is removed in a vacuum atmosphere by using a foreign matter removing brush roll in contact with the base material and a foreign matter embedding brush roll interlocking with the foreign matter removing brush roll while being in contact therewith. Thus, adhesive matter is prevented from adhering by the adhesive roll, and re-adhering of the foreign matter adhering to the foreign matter removing brush roll to the base material is prevented. The foreign matter removing method removing foreign matter on the surface of rugged wiring patterns, and the forming apparatus of the multi-layered body using the method are provided. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |