| 摘要 |
PROBLEM TO BE SOLVED: To increase the size of process monitors to be formed in scribe line regions, and to keep the versatility over a measurement jig even when measuring large-scale process monitors. SOLUTION: A group of process monitors 159 is formed in a longitudinal scribe line region 111C and a lateral scribe line region 112C in a 1-shot region 100 of a stepper used for lithography technology. A group of electrode pads 169 electrically connected to the group of process monitors to measure the group of process monitors 159 are formed only in the longitudinal scribe line region 111C. Part of the group of process monitors 159 and group of electrode pads 169 are formed in an intersection region 113 between the longitudinal and lateral scribe line regions. COPYRIGHT: (C)2007,JPO&INPIT
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