Method for fabricating flash memory device

摘要

A method for fabricating a flash memory device includes the steps of forming a buffer film on a semiconductor substrate having a defined active region; controlling a threshold voltage of a memory cell by ion-implanting dopants into the active region of the substrate under the buffer film; removing the buffer film by performing a wet-cleaning process whose target thickness is about 1 to about 1.5 times the buffer film thickness; and forming a tunnel dielectric film on the active region of the exposed substrate after the buffer film is removed.