Pressure sensor with electronic datasheet

摘要

A pressure sensing system and method includes a pressure sensor configured to include a pressure sensing diaphragm and a pressure port. A memory circuit incorporated can be incorporated into the pressure port. A high order polynomial component can also be provided. One or more excitation signals are then applicable to the pressure sensor such that a voltage output thereof is measured and recorded at a plurality of predefined temperatures and pressures in order to generate pressure sensor output data. Such output data is then automatically input to the high order polynomial component in order to generate a set of correction coefficients usable for improving the accuracy of the pressure sensor. The pressure sensing diaphragm is preferably based on an Advanced Thick Film (ATF) configuration.