| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bearing used under the vacuum environment allowing no oil, usable at high rotational speed, and having long service life. <P>SOLUTION: This rolling bearing 1 is provided with an inner ring 2 and an outer ring 3, a plurality of rolling bodies 4 provided between the inner ring 2 and the outer ring 3, and a cage 5 coming into slide-contact with the plurality of rolling bodies 4 to hold them and is constituted to form a coating containing tungsten disulfide powders on faces in at least one section or more of a surface of the cage 5. A ratio of blended tungsten disulfide powders in the coating is 70 volume% to 98 volume%. In particular, this rolling bearing is used as a touch-down bearing for a turbo-molecular pump. <P>COPYRIGHT: (C)2007,JPO&INPIT |
