| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an instrument for measuring a distance between a sample and a reference point. SOLUTION: This method for measuring the distances Z between the inspected sample 12 and at least the reference points 19, 21 has a process for modulating a signal into the first potential of the sample 12, for supplying a primary particle beam to the sample 12, for detecting a secondary particle beam, and a modulation signal of a particle in the secondary particle beam modulated into the second potential, and for comparing the detected modulation signal with a reference signal. This instrument of the present invention has a modulation unit 22 for modulating the signal into the first potential of the sample 12, a beam generator 2 for generating the primary particle beam colliding with the sample 12, detectors 19, 20, 21 for detecting the secondary particle beam and the modulation signal of the particle in the secondary particle beam modulated into the second potential, and an evaluation unit 25 for comparing the detected modulation signal with the reference signal. COPYRIGHT: (C)2007,JPO&INPIT |
