| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and method capable of inspecting (detecting) precisely a foreign matter existing in an optical material, in a short time, by simple constitution. SOLUTION: This inspection device for detecting the foreign matter existing in the optical material, has a light source part for emitting a light beam and for changing a frequency of the light beam, a light guide means for guiding the light beam emitted from the light source part to a reference mirror face and the optical material, and a computing means for computing three-dimensional position coordinates of the foreign matter existing in the optical material, based on an interference light beam of a light beam reflected from the reference mirror face with a light beam reflected from the foreign matter existing in the optical material. COPYRIGHT: (C)2007,JPO&INPIT
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