| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate support used for substrate treatment and its manufacturing method. SOLUTION: The method and apparatus for forming the substrate support are provided. In one embodiment, the substrate support is manufactured by the method including a step of forming a grooves in a body, a step of arranging a heating element in the groove, a step of welding the groove so as to enclose the heating element and a step of forcing the welding so as to bring at least a portion of the body into tight contact with the heating element. In another embodiment, the method of forming the substrate support includes the step of forming the groove in the body, the step of arranging the heating element in the groove, and the step of agitation welding the groove to close the groove so as to house the heating element therein. COPYRIGHT: (C)2007,JPO&INPIT
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