| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprinting apparatus and its method obtaining a mold-releasing operation minimizing the occurrence of defect while maintaining productivity. SOLUTION: The imprinting apparatus 10 is equipped with a plurality of driving devices 11, 23 which transfer a microstructure 18a of a mold 18 onto a material 19 to be molded by relatively bringing the mold 18 and the material 19 to be molded closer to each other, pressing and mold-releasing, relatively move the mold and the material to be molded to each other along an axis of a pressing direction, and make different relative moving speed of the mold and the material to be molded during the relative motion. COPYRIGHT: (C)2007,JPO&INPIT
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