| 摘要 |
PROBLEM TO BE SOLVED: To enhance uniformity of a beam current density distribution in the y-direction (longitudinal direction) of an ion beam without having an adverse influence to parallelism and the divergence angle of the ion beam. SOLUTION: This ion beam irradiating device is equipped with a beam profile monitor 14 to measure the beam current density distribution in the y direction of the ion beam 4 in the vicinity of a target 8, groups of movable shielding plates 18a, 18b which are disposed side by side in the y direction to face each other while holding an ion beam passage in the further upstream side than a target position between them and each of which has a plurality of movable shielding plates 16 movable in the x direction independently from each other, shielding plate driving devices 22a, 22b driven to reciprocate the movable shielding plates 16 composing them in the x direction independently from each other, and a shielding plate control device 24 to enhance uniformity of the beam current distribution in the y direction by relatively increasing the amount of the ion beam 4 shielded by the movable shielding plates 16 facing each other and corresponding to positions where the measured beam current density in the y direction is relatively large by controlling the shielding plate driving devices 22a, 22b based on the measured information by the monitor 14. COPYRIGHT: (C)2007,JPO&INPIT
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