| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe holding structure capable of easily mounting probes to a probe support substrate. SOLUTION: The probe holding structure is provided for a probe card 100 and holds the electrically conductive spring type probes 1 each having both a spring part and a needle part having a diameter smaller than the spring part and linearly extending from one end of the spring part. The probe holding structure has an interposer 40 arranged on the side of the probe card 100 and the probe support substrate 20 arranged on the side of an object to be measured with its principal plane opposed to the interposer 40. The interposer 40 is provided with electrically conductive paths 41 for electrically connecting the spring type probes 1 to the probe card 100. Through holes intersecting with the principal plane at right angles are formed in the probe support substrate 20. The probe support substrate 20 and the interposer 40 hold the spring parts in a contracted state between both substrates by passing the needle parts through the through holes and bringing the rear ends of the spring parts into contact with wiring means. COPYRIGHT: (C)2007,JPO&INPIT
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