| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of determining acceptability of an optical element under inspection by detecting with once measurement of surface shape error, eccentric error between surfaces, refractive index distribution etc. , even without reference lens. SOLUTION: The optical element inspection device comprises: a light source 11; a light flux splitting means 18 for splitting the light flux from the light source 11 into light flux M to be inspected and reference light flux R; a correction optical system 23 arranged in a light flux M to be inspected in which an optical element 22 under inspection is arranged for converting the transmission wave front of the optical element 22 under inspection based on the design value; a light flux composition means 26 for compositing the light flux M to be inspected transmitted through the correction optical system 23 and reference light flux R collimated via different light path from the light flux M to be inspected; an imaging means 28 for imaging the light flux transmitted through the light flux composition means 26; a parameter calculation means 31 for calculating the parameter regarding the wave front transmitted through the detection optical element 22 based on the interference fringe formed by the imaging means 28; and an evaluation value operation means 31 for calculating the evaluation value of the optical element 22 under inspection based on the parameters. COPYRIGHT: (C)2007,JPO&INPIT
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