THROUGH-WAFER INTERCONNECTION

摘要

A through-wafer interconnect and a method for fabricating the same are disclosed. The method starts with a conductive wafer (300) to form a patterned trench by removing material of the conductive wafer. The patterned trench extends in depth from the front side to the backside of the wafer, and has an annular opening generally dividing the conductive wafer into an inner portion and an outer portion whereby the inner portion of the conductive wafer is insulated from the outer portion and serves as a through-wafer conductor (310). A dielectric material (320) is formed or added into the patterned trench mechanical to support and electrically insulate the through-wafer conductor. Multiple conductors can be formed in an array.