Micro optical scanner capable of measuring operating frequency of micro mirror

摘要

A micro optical scanner, which is capable of measuring the operating frequency of a micro mirror, includes: a substrate; the micro mirror which is integrally formed with the substrate and rotates to scan incident light; a package block sealing the substrate and the micro mirror and including a transparent window in an upper portion thereof; and at least one photo detector which detects reflected light from the transparent window from the light scanned by the micro mirror.