Micro mirrors for e.g. used as scanner for bar code reader, has retaining unit in which mirror is retained in such way that it tilts about mirror pivotal axis and mirror has two fixed electrode groups with multiple electrodes

摘要

The micro mirror (100) has a retaining unit (5a,5b,11,12) in which mirror (1) is retained in such a way that it tilts about the mirror pivotal axis (O). The mirror has two fixed electrode groups (11a,11b,12a,12b) with multiple electrodes, which are fixed to the retaining unit. The mirror has one movable electrode group (2a,2b) fixed to the mirror and are adjacent to the former fixed electrode group (11a,11b). The mirror also has other movable electrode group, fixed to the mirror and adjacent to the latter fixed electrode group. The former and the latter fixed electrode groups are arranged on opposite sides of the mirror pivotal axis. The electrode (2b) of former movable electrode group is arranged above an adjacent electrode (11b) of the first fixed electrode group and the electrode (3a) of former movable electrode group (3a,3b) is arranged above an adjacent electrode (12a) of the first fixed electrode group (12a,12b). An independent claim is also included for micro mirror device which has a micro mirror.