| 摘要 |
A nozzle is provided to prevent a lot of process gas from being sprayed in an instant by installing separate pressure buffing members at outlet ports of body which is connected to a process gas supply source. A process gas supply source(160) stored a given volume of a process gas, and supplies the process gas through a body(140) which is provided with plural outlet ports(150a,150b,150c). A regulator(170) is installed on one side of the process gas supply source, and an air valve(180) which is opened and closed by a spring is connected to one side of the regulator. The air valve is provided with a mass flow meter at one side thereof. Pressure buffing members(151a,151b,151c) are attached to the outlet ports.
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