CAP TYPE ELECTROSTATIC CHUCK

摘要

A cap type electrostatic chuck is provided to extend life span of the electrostatic chuck and to prevent a wafer contamination owing to particles by forming a separation layer having a superior electric resistance and chemical resistance on the surface of the electrostatic chuck. An electrostatic chuck(100) comprises the followings: a body(110) installed in a chamber; a plate(120) installed on the body; a wafer mounted on the plate; an internal electrode(130) built in the plate so as to generate electrostatic power for chucking the wafer. A cap type electrostatic chuck comprises; a shield ring formed on a peripheral surfaces contacting the wafer for attaching the plate to the upper surface of the body; a separation layer(140) having higher resistance quotient than the plate formed on the surface of the plate, so that the wafer is smoothly dechucked.