A WAFER TRANSFERRING BOAT

摘要

A boat for transferring a wafer is provided to reduce damage of the wafer and generation of particles by using a plurality of slot guides, each of which has a slope. A first plate(110) and a second plate(140) are arranged in parallel and constantly spaced away from each other. Both ends of plural supporting bars(120) are respectively connected to the first plate and the second plate. Plural slot guides(130) are formed to be extended from an external surface of each supporting bar in vertical and longitudinal directions of the supporting bar. The slot guides receive plural wafers(W). Upper surfaces of the slot guides where the wafers are loaded have an upward slope toward the center of the wafer.