发明名称 METHOD FOR FABRICATION OF IMAGE SENSOR WITH REMOVED COLOR FILTER
摘要 A method for manufacturing an image sensor is provided to simplify the process and to reduce manufacturing costs by implementing color property using a SOG(Spin On Glass) film without forming a color filter when performing an IMD(Inter Metal Dielectric) process. A photodiode is formed on a substrate(200). A first metal line(203) is formed on the substrate. A first SOG film(204) with a first color is formed on the first metal line. A second metal line(207) is formed on the first SOG film. A second SOG film(208) with a second color is formed on the second metal line. A third metal line is formed on the second SOG film. A third SOG film with a third color is formed on the third metal line.
申请公布号 KR20070070425(A) 申请公布日期 2007.07.04
申请号 KR20050132937 申请日期 2005.12.29
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 JO, SEUNG MO
分类号 H01L27/146 主分类号 H01L27/146
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