METHOD FOR MANUFACTURING DOUBLE FUSE BOX

摘要

A method for fabricating a dual fuse box is provided to fabricate two fuse boxes on the same area without an additional process by forming a second fuse line of a zigzag type made of aluminum between first fuse lines made of plate poly. A first fuse layer(10) is formed in a fuse box region, made of polysilicon constituting a plate electrode of a capacitor. A first metal interconnection layer is formed on the first fuse layer. An etch process using the first metal interconnection mask is performed to form a second fuse layer(14) on an upper layer of the first fuse layer. The second fuse layer can be made of aluminum. A guard ring can be formed in the outer part of the first fuse layer in the fuse box region.