发明名称 ADAMANTANE DERIVATIVE, PROCESS FOR PRODUCING THE SAME, AND PHOTOSENSITIVE MATERIAL FOR PHOTORESIST
摘要 <p>The invention provides a novel adamantane derivative useful as a monomer for producing functional resins such as photosensitive resins particularly for use in lithography, and a method for producing the derivative. The adamantane derivative has a structure represented by formula (I-a) and the method for producing the adamantane derivative employs a corresponding adamantane derivative serving as a starting material. In formula (I), R 1 represents H, CH 3 , or CF 3 ; R 2a represents a C1 to C30 alkyl group or a hydrocarbon group containing a C3 to C30 cycloalkyl group or a C6 to C30 aryl group, the alkyl group or the hydrocarbon group having a hetero atom; each of X 1 and X 2 represents O or S; Y represents a C1 to C10 alkyl group, a halogen atom, OH, or SH, or two Ys are linked to form =O or =S; k represents an integer of 0 to 14; and each of m and n is an integer of 0 to 2.</p>
申请公布号 EP1803708(A1) 申请公布日期 2007.07.04
申请号 EP20050785928 申请日期 2005.09.21
申请人 IDEMITSU KOSAN CO., LTD. 发明人 HATAKEYAMA, NAOYOSHI;TANAKA, SHINJI
分类号 C08F20/28;C07C323/12;C07C69/013;C07C69/54;C07C309/71;C08F20/38;G03F7/039;H01L21/027 主分类号 C08F20/28
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