| 摘要 |
A sensor and a module for a bio-marker using a micro bridge mass sensor are provided to easily detect materials in low concentration in real-time. A bio-marker sensor using a micro bridge mass sensor include a detecting layer(100), an electrode line(160), a lower electrode(140), two piezoelectric driving layers(110), an insulation layer(150), and an upper electrode(130). The detecting layer is formed on a surface of a piezoelectric micro bridge. The electrode line applies electric field to the upper electrode and the lower electrode for driving elements. The lower electrode is separated into two pieces and is formed on a supporting layer(120). The two piezoelectric driving layers are formed on the lower electrode. The insulation layer is formed on the lower electrode and on a certain area of the piezoelectric driving layers for insulating upper and lower electrodes. The upper electrode is formed on the insulating layer and the piezoelectric driving layers.
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