| 摘要 |
A transfer robot system for preventing damage to a substrate and a control method using the same are provided to accurately measure the teaching position to a minute value by using displacement sensors. A transfer robot system includes a cassette(100), a transfer robot(200), a plurality of sensors(300), and a transfer robot controller(500). A plurality of slots receiving a substrate are formed on both side walls of the cassette. The transfer robot enters a teaching position to load and unload the substrate. The displacement sensors are installed in the slots of the cassette to detect movement of the transfer robot when the transfer robot enters the cassette. The transfer robot controller detects the slot positions of the cassette and detects the teaching position to the cassette through the displacement sensors to prevent damage to the substrate by controlling the operation of the robot according to the teaching position.
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