| 摘要 |
An electrostatic chuck apparatus capable of appropriately and swiftly diselectrifying a board to be processed. In an electrostatic chuck apparatus (11) for electrostatically adsorbs, by use of the surface of a support base (12), a board (W) to be processed, a diselectrifying circuit is formed which includes a diselectrifying electrode (16) facing the surface of the support base (12); a diselectrifying ground potential (19); and a diselectrifying resistor (17) connected between the diselectrifying electrode (16) and the ground potential (19). The resistance of the diselectrifying resistor (17) is established such that it is lower than that of an insulating layer (13) of the surface of the support base (12); the diselectrifying resistor (17) can hold the potential of the processed board (W) during an electrostatic chuck operation; and such that the diselectrifying resistor (17) can dissipate the potential of the processed board (W) into the ground potential (19) when the electrostatic chuck is canceled. This structure can appropriately and swiftly diselectrify the processed board (W).
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