| 摘要 |
An apparatus for detecting a substrate of a cassette is provided to prevent a process delay when a substrate is abnormally received or not received, by installing a substrate detecting unit on the lateral surface of a cassette to detect the substrate received in the cassette. At least one substrate is received in a cassette. A substrate detecting unit detects the substrate received in the cassette, installed on the lateral surface of the cassette. A protection member protects the substrate from the cassette, installed between the substrate detecting unit and the cassette. The cassette can be loaded into a stage. A driving unit transfers the substrate detecting unit, connected to the substrate detecting unit.
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