发明名称 APPARATUS FOR ALIGNING CASSETTE
摘要 An apparatus for aligning a cassette is provided to simultaneously perform the loading and alignment of a cassette when loading the cassette with a substrate or a panel, thereby reducing the time required for performing processes. A substrate or a panel is loaded at a cassette(40). Position bars(70) are installed at the determined height at a side of a port for loading the cassette. When loading the cassette, an alignment member moves horizontally and downwardly the cassette on the upper portion of the position bar. The alignment member includes a seating member contacted with the lower side surface of the cassette. A slider is combined with a side of the seating member by the previously set angle. The slider is slidably combined to a guide member. The seating member comprises a seat contacted with the lower side of the cassette. A stopper is formed at a side of the seat and supports a side of the cassette. The seating member also includes plural rotation members contacted at the lower side of the cassette.
申请公布号 KR20070072294(A) 申请公布日期 2007.07.04
申请号 KR20060016957 申请日期 2006.02.21
申请人 TOP ENGINEERING CO., LTD. 发明人 LEE, KYEONG WOO;JEAN, SEONG ROCK;SHIN, KYUNG AN;KANG, YOUN KU
分类号 G02F1/13;H01L21/68 主分类号 G02F1/13
代理机构 代理人
主权项
地址