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发明名称
半导体晶片检查装置
摘要
申请公布号
CN3665261D
申请公布日期
2007.07.04
申请号
CN200630008118.5
申请日期
2006.03.29
申请人
东京毅力科创株式会社
发明人
野口政幸
分类号
10-05
主分类号
10-05
代理机构
北京纪凯知识产权代理有限公司
代理人
龙 淳
主权项
地址
日本国东京都
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