LIGHT IRRADATION EQUIPMENT

摘要

A light irradiating equipment is provided to improve the manufacturing yield by optically aligning an alignment layer while scanning a substrate with a line type light source and improve an alignment characteristic by equalizing a light illumination characteristic to an alignment layer formed on a large substrate by forming a bonded plane of quartz substrates in an oblique line to substrate planes. A line type light source(201) provides a non-polarized light. A polarizing element(211) polarizes the light provided from the light source and is formed of a plurality of quartz substrates(200) which are bonded with each other in a state that light incident planes of the quartz substrates are cut in an oblique line and the quartz substrates are arranged in the same direction as the length direction of the light source. A vibration control unit vibrates the polarizing element in a predetermined vibration width.