发明名称 CMOS IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME
摘要 A CMOS image sensor and its manufacturing method are provided to improve reaction at a low and high illumination by forming a gate electrode of a transfer transistor and forming a floating diffusion region between photodiode regions, and to extend the operation range by rising up a saturation level of the floating diffusion region. A CMOS image sensor comprises a transistor for transmitting electrons produced from a photodiode region to a floating diffusion region(109). A gate electrode of the transistor is a finger type and the floating diffusion region is formed between the photodiode regions. The transistor is a transfer or a reset transistor. A device isolation layer is formed on an isolation region of a semiconductor substrate which is defined by an active region and the isolation region. A first and second gate electrodes(104a,104b) having an uniform gap are formed on the active region by installing a gate insulating layer. The floating diffusion region is formed on the surface of the semiconductor substrate between the first and the second gate electrode. A first and second photodiode regions(106a,106b) are formed on the surface of the semiconductor substrate between the floating diffusion regions.
申请公布号 KR20070070530(A) 申请公布日期 2007.07.04
申请号 KR20050133165 申请日期 2005.12.29
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 LIM, KEUN HYUK
分类号 H01L27/146 主分类号 H01L27/146
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