| 摘要 |
A mass flow controller to detect actual gas flow in real-time is provided to control the flowing of gas flows through a bypass by controlling a control valve according to a setting value. A mass flow controller(100) to detect actual gas flow in real-time includes a main tube(120), a bypass tube(140), a sensor(200), and a control valve(320). The main tube transmits a gas supplied from a supply source where the gas is stored to a process chamber executing a manufacturing process. A part of the gas flowing in the main tube flows in the bypass tube. The bypass tube is wrapped in the coil of a heat-transferring method sensor. The sensor outputs a temperature change generation value to a control circuit unit by sensing a temperature change generating at both sides of a sensing coil according the flowing of the gas flowing through the bypass tube. The control valve operated by an actuator(300) controls the flow of the gas according the control of the control circuit unit measuring the actual mass flow of the gas flowing through the mass flow controller based on the temperature change generation value of the flowing of the gas inputted from the sensor.
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