SUBSTRATE CARRIER HAVING REDUCED HEIGHT,申请号EP20050794310-传众专利搜索

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发明名称	SUBSTRATE CARRIER HAVING REDUCED HEIGHT
摘要
申请公布号	EP1803146(A2)	申请公布日期	2007.07.04
申请号	EP20050794310	申请日期	2005.09.02
申请人	APPLIED MATERIALS, INC.	发明人	ELLIOT, MARTIN, R.;RICE. MICHAEL, R.
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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