发明名称 ROTARY STOCKER
摘要 A rotary stocker is provided to enable stacking of a cassette even in a small space by including stocker in which a shelf is rotated. A cassette(100) is stored on a shelf(95). The shelf is loaded/unloaded into/from the cassette by a transfer part(10). The shelf is supported by a plurality of shelf support units(30). The shelf support unit is rotated by a rotational driving part(50). The transfer part can be fixed to an isolated region of the shelf support units, including a robot(15) capable of loading/unloading the cassette.
申请公布号 KR20070072005(A) 申请公布日期 2007.07.04
申请号 KR20050135917 申请日期 2005.12.30
申请人 LG.PHILIPS LCD CO., LTD. 发明人 LEE, SANG SEOK
分类号 H01L21/673;H01L21/677 主分类号 H01L21/673
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