MICRO OPTICAL SCANNER CAPABLE OF MEASURING OPERATION FREQUENCY OF REFLECTING MIRROR

摘要

A micro optical scanner capable of measuring operation frequency of a micro mirror is provided to exactly measure operation frequency and to secure the low manufacturing cost by integrally fabricating an optical detector with an SOI(Silicon-On-Insulator) substrate on the SOI substrate, and thus fabricating the optical detector and the micro mirror at the same time. A micro optical scanner(20) capable of measuring operation frequency of a micro mirror(24) is composed of a substrate(23); the micro mirror integrated with the substrate in the substrate and seesawed to scan the incident light; package blocks(22a,22b) for enclosing the substrate and the micro mirror and having a transparent window(26) installed at the upper part to transmit the light; and at least one optical detector(25) for detecting the light reflected from the transparent window among the lights scanned by the micro mirror.