发明名称 |
METHOD OF MANUFACTURING CERAMIC MULTI-LAYER SUBSTRATE, AND UNBAKED COMPOSITE LAMINATED BODY |
摘要 |
<p>A method of producing a ceramic multilayer substrate comprising the steps of: as a first step, producing a green composite laminate 11 containing first and second shrink-suppressing layers formed on one main surface 13 and the other main surface 14 of a green multilayer mother substrate 12 comprising a plurality of ceramic green layers 17 containing ceramic powder, the first and second shrink-suppressing layers containing a sintering-difficult powder substantially incapable of being sintered under the sintering conditions for the ceramic powder; as a second step, forming first grooves 16 extending from the first shrink-suppressing layer 13 side so as to pass through the first shrink-suppressing layer 13 and reach a part of the multilayer mother substrate 12; as a third step, firing the composite laminate 11; as a fourth step, removing the first and second shrink-suppressing layers 13 and 14 and taking out the sintered multilayer mother substrate 11; and as a fourth step, dividing the multilayer mother substrate 12 along the grooves 16, and taking out a plurality of the ceramic multilayer substrates. Thereby, the shrink in the plan direction at firing can be suppressed. Thus, a ceramic multilayer substrate having a high dimensional accuracy and a high reliability can be produced with a high production efficiency. <IMAGE></p> |
申请公布号 |
EP1272020(A4) |
申请公布日期 |
2007.07.04 |
申请号 |
EP20010997979 |
申请日期 |
2001.11.22 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
SAITOH, YOSHIFUMI;KAWAKAMI, HIROMICHI |
分类号 |
B28B11/24;B28B17/00;B32B18/00;B32B37/00;C04B35/638;H01L21/48;H01L23/15;H05K1/03;H05K3/00;H05K3/46;(IPC1-7):H05K3/46;B28B11/00;H01L23/12 |
主分类号 |
B28B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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