发明名称 Semiconductor device having die attachment and die pad for applying tensile or compressive stress to the IC chip
摘要 A semiconductor device comprises a substrate, a ferroelectric capacitor which includes a ferroelectric film on the substrate, and a stress application layer which applies tensile or compressive stress to the ferroelectric film of the ferroelectric capacitor by applying stress to the substrate.
申请公布号 US7239026(B2) 申请公布日期 2007.07.03
申请号 US20060440068 申请日期 2006.05.25
申请人 发明人
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
代理机构 代理人
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