| 摘要 |
A tungsten polishing pad of a CMP process is provided to perform stably the maintenance according to temperature by installing a temperature detecting sensor at a portion between a heating unit and a cooling unit. An automated temperature control device is installed at a polishing pad, so that the maintenance is properly controlled according to the temperature detected at the polishing pad. The automated temperature control device includes a heating part(110) on an upper pad(100) of the polishing pad, a cooling unit(210) on a lower pad(200) of the polishing pad, and a temperature detecting sensor(150) between the heating part and the cooling part.
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