发明名称 Liquid coating device with barometric pressure compensation
摘要 A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
申请公布号 US7238239(B2) 申请公布日期 2007.07.03
申请号 US20030628598 申请日期 2003.07.28
申请人 FSI INTERNATIONAL, INC. 发明人 DAGGETT JOSEPH W.;WILLIAMS DANIEL J.;KEMP KEVIN G.;CAYTON JOSEPH W.
分类号 B05C11/02;B05B1/28;B05C5/00;B05C9/14;B05C11/00;B05C11/08;B05C11/10;H01L21/00 主分类号 B05C11/02
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