发明名称 |
Liquid coating device with barometric pressure compensation |
摘要 |
A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
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申请公布号 |
US7238239(B2) |
申请公布日期 |
2007.07.03 |
申请号 |
US20030628598 |
申请日期 |
2003.07.28 |
申请人 |
FSI INTERNATIONAL, INC. |
发明人 |
DAGGETT JOSEPH W.;WILLIAMS DANIEL J.;KEMP KEVIN G.;CAYTON JOSEPH W. |
分类号 |
B05C11/02;B05B1/28;B05C5/00;B05C9/14;B05C11/00;B05C11/08;B05C11/10;H01L21/00 |
主分类号 |
B05C11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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