METHOD FOR OPTIMIZING TEMPERATURE AND MEDIUM FOR STORING PROGRAM FOR CARRYING OUT THE METHOD

摘要

A method for optimizing a temperature in bake process and a medium for storing a program for the same are provided to improve stability of a microlens line width by change temperature condition of bake process to obtain an optimal temperature condition. A bake process is performed on a microlens pattern by changing temperature conditions(100). Variation of a threshold energy value required for each temperature condition is measured(110). First data with respect to the temperature condition and second data with respect to the threshold energy value are collected to be represented as a function(120). The function is computed to calculate a point where the variation of the threshold energy value is rapidly changed according to the temperature change(150).