ELECTROSTATIC CHUCK AND HEATER

摘要

An electrostatic chuck and a heater are provided to perform effectively a chucking process, a plasma treatment and a heating process by supplying stably power to a conductive member and a heating element using a connector having an enhanced connection reliability. An opening portion(115) is formed at an insulating plate(110). A conductive member(120) is embedded in the insulating plate. The conductive member is partially exposed to the outside through the opening portion of the insulating plate. A body(132) is inserted into the insulating plate through the opening portion. The body includes a plurality of terminal grooves. Terminals(136) are inserted into the terminal grooves to supply power to the conductive member. Elastic members(138) are arranged at the terminal grooves to support elastically the terminals toward the conductive member side.