| 摘要 |
A method for analyzing a process status of semiconductor devices classified by a group basis in an MES(Manufacturing Execution System) is provided to manage the semiconductor devices having various conditional variables in a group basis by reconstructing a process status of all semiconductor devices. In order to analyze a process status of semiconductor devices classified by a group basis in an MES, a search list of the semiconductor devices, for which a current process status in a semiconductor inline is analyzed, is made and inputted(S300). Current state information on the semiconductor devices described in the search list is read out(S306). Log point description and operation point description for lot numbers of the semiconductor devices in the search list are combined based on the current state information to generate secondary process state information(S310). The process status of all semiconductor devices in the search list is reconstructed and displayed as a single group title(S320).
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