发明名称 Uniaxial drive unit and surface shape measuring apparatus using the same
摘要 There is provided a uniaxial drive unit using a linear motor having a fixed part which is a rod-shaped magnet fixed to a unit body and formed so that the N poles and the S poles are arranged alternately; and a moving part which is a ring-shaped member having a coil member, fitted on the fixed part, and capable of moving along the fixed part. A driving section provided so as to be slidable in the uniaxial direction with respect to the unit body is connected to the moving part or a balance weight fixed to the moving part by a winding motion transmission member via a winding motion transmitting support member provided near one end or both ends of the unit body.
申请公布号 US7239050(B2) 申请公布日期 2007.07.03
申请号 US20040807133 申请日期 2004.03.24
申请人 TOKYO SEIMITSU CO., LTD. 发明人 MIYAMOTO HIROSHI
分类号 G01B21/30;H02K41/00;G01B5/004;G01B5/20;H02K41/02;H02K41/03 主分类号 G01B21/30
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