| 摘要 |
A wafer inspection apparatus for a semiconductor is provided to prevent beforehand a process accident due to damage from dropping the wafer by transmitting the wafer after verifying the absorption state before vacuum absorbing. A wafer(W) inspection apparatus comprises a robot arm driver(10), a robot arm(20) which moves forward and backward along the wafer bottom edges and an absorption part(40) installed on the ends of the robot arm and for vacuum-absorbing the bottom edges of the wafer. A detector(30) is installed for verifying the state of surfaces for absorbing the wafer bottom edges.
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