| 摘要 |
A wafer transfer apparatus is provided to reduce a process time by treating simultaneously three or more wafers and transferring the wafer to a loadlock module in a predetermined process at a process module. A wafer transfer apparatus(100) includes an EFEM(Equipment Front End Module)(110) with a first robot(111) for transferring a plurality of wafers, a loadlock module(120) having a common loader with a plurality of slots capable of loading stably the wafers transferred by the first robot, a plurality of transfer modules, and a plurality of process modules. The plurality of transfer modules(130) includes a second robot, respectively. The second robot is used for transferring at least one out of the wafers loaded on the slots of the common loader. The plurality of process modules(140) includes a shaft, respectively. The shaft is used for loading stably the wafer transferred by the second robot of the transfer module.
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