APPARATUS FOR MONITERING TRANSPORT OF WAFER IN SEMICONDUCTOR MANUFACTURING UNIT

摘要

An apparatus for monitoring wafer transfer in semiconductor fabricating equipment is provided to monitor a slope level of a blade of a robot when a wafer is transferred to a process chamber. A level detecting sensor is installed on an arm(13) of a robot(11) to detect a slope of a blade(15) supporting the wafer. An allowable slope storing unit(105) stores an allowable slope value to prevent the blade from being collided against a wall of a chamber or other structures even when the blade is inclined. A slope analyzing unit(106) receives the detected level value of the blade, and compares the value with the allowable slope value to alarm collision danger through an alarm portion(107).