LIFT PIN MODULE OF FPD MANUFACTURING MACHINE

摘要

A lift pin module of a flat display device manufacturing apparatus is provided to prevent the damage of a substrate by keeping upper and lower pressures applied to a substrate in the same level using a predetermined path capable of flowing gas to a space between an electrode and a substrate in case of substrate dechucking. A lift pin module of a flat display device manufacturing apparatus includes a plurality of lift pins and a pin housing. The plurality of lift pins(120) are spaced apart from each other on an electrode. The pin housing(122) is installed at the electrode. The lift pins are inserted into the pin housing. The pin housing includes a predetermined path capable of flowing gas to a space between the electrode and a substrate.